φ 30 Super smooth substrate

Features: high surface accuracy, super smooth surface, high laser damage resistance threshold

Application fields: soft X-ray detector, soft X-ray microscope, soft X-ray projection lithography machine, ultraviolet laser, ultraviolet laser marking machine, laser gyro, etc.

Requirements for materials:

Materials: JGS1, Corning 7980, Heraeus 312 and other fused quartz, microcrystals, crystals, etc

Allowable difference of refractive index nd: ± 2 × 10-4

Allowable difference of dispersion coefficient vd: ± 0.2%

Optical uniformity: ± 2 × 10-6

Stress birefringence: 2-5nm/cm

Fringe degree: C

Bubble degree: a0

Optical absorption coefficient: k200 ＜ 0.005cm-1

Technical indicators